#secs/gem solution for factory

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SECS/GEM on Canon MPA 600 Super Aligner Through the EIGEMBox

In the dynamic world of semiconductor manufacturing, ensuring that legacy equipment can keep up with modern communication standards is essential for maintaining productivity and efficiency. The Canon MPA 600 Super Aligner, a widely used piece of equipment in semiconductor fabs, often lacks the native SECS/GEM capabilities required for seamless integration into contemporary manufacturing systems. Enter EIGEMBox, a patented, plug-and-play solution that brings SECS/GEM compliance to legacy equipment without the need for extensive hardware or software installations.

In this blog, we will explore the benefits of using EIGEMBox to enable SECS/GEM on the Canon MPA 600 Super Aligner and how this can revolutionize your manufacturing process.

What is SECS/GEM?

SECS/GEM (SEMI Equipment Communications Standard/Generic Equipment Model) is a set of protocols developed by SEMI (Semiconductor Equipment and Materials International) to standardize communication between semiconductor manufacturing equipment and host systems. These protocols are critical for enabling automation, real-time data collection, and equipment control, which are essential for the efficiency and productivity of modern semiconductor fabs.

The Importance of SECS/GEM Compliance SECS/GEM compliance offers several significant benefits for semiconductor manufacturing: Automation: SECS/GEM protocols enable the automation of equipment operations, reducing the need for manual intervention and minimizing the risk of human error. This leads to higher throughput and more consistent production quality.

Data Collection and Analysis: SECS/GEM allows for real-time data collection from equipment, which can be analyzed to monitor performance, optimize processes, and predict maintenance needs. This data-driven approach helps in making informed decisions that improve overall efficiency.

Equipment Control: With SECS/GEM, equipment can be controlled remotely by the host system, allowing for better coordination and scheduling of manufacturing tasks. This ensures optimal utilization of resources and reduces downtime.

Interoperability: SECS/GEM provides a standardized communication framework, ensuring that equipment from different vendors can work together seamlessly. This interoperability is crucial for maintaining a cohesive and efficient manufacturing environment.

Challenges with Legacy Equipment

While SECS/GEM offers numerous advantages, many legacy equipment like the Canon MPA 600 Super Aligner lack native SECS/GEM capabilities. Upgrading these machines to meet modern standards can be a complex and costly process, often requiring significant hardware and software modifications. This is where EIGEMBox comes into play.

Introducing EIGEMBox

EIGEMBox is an innovative, patented solution designed to bring SECS/GEM capabilities to legacy equipment without the need for additional hardware or software installations. This plug-and-play device makes it easy to upgrade older machines, ensuring they can communicate effectively with modern control systems and integrate seamlessly into automated manufacturing environments.

Key Features of EIGEMBox

Plug-and-Play Convenience: EIGEMBox is designed for easy installation and operation. Simply connect the device to your legacy equipment, and it starts working immediately, without the need for extensive configuration or setup.

No Hardware or Software Installation Required: Unlike traditional SECS/GEM integration solutions that often require complex hardware and software installations, EIGEMBox eliminates these hassles. This makes it a cost-effective and time-saving solution for upgrading your equipment.

Patented Technology: EIGEMBox utilizes patented technology to ensure reliable and efficient communication between your legacy equipment and modern control systems. This guarantees seamless integration and improved operational efficiency.

Enhanced Data Exchange: With EIGEMBox, your legacy equipment can exchange data in real-time with control systems, enabling better monitoring, analysis, and optimization of manufacturing processes.

Benefits of Using EIGEMBox with Canon MPA 600 Super Aligner

Upgrading the Canon MPA 600 Super Aligner with EIGEMBox offers several significant benefits:

Extended Equipment Life: By enabling SECS/GEM compliance, EIGEMBox extends the operational life of the Canon MPA 600 Super Aligner, allowing you to maximize your investment in this equipment.

Improved Efficiency: Enhanced communication and control capabilities lead to better coordination of manufacturing tasks, increased throughput, and reduced downtime. This results in the overall improved efficiency of your manufacturing process.

Cost Savings: EIGEMBox eliminates the need for costly hardware and software upgrades, providing a more affordable solution for integrating SECS/GEM protocols into your manufacturing processes.

Seamless Integration: EIGEMBox ensures that your Canon MPA 600 Super Aligner can communicate effectively with modern control systems, enabling a smoother and more efficient manufacturing operation.

Case Study: Successful Integration of EIGEMBox with Canon MPA 600 Super Aligner

One of our clients, a leading semiconductor manufacturer, faced challenges in integrating SECS/GEM protocols into their Canon MPA 600 Super Aligner. After implementing EIGEMBox, they experienced a significant improvement in production efficiency. The plug-and-play nature of EIGEMBox allowed for a quick and hassle-free integration process, resulting in a 20% increase in equipment utilization and a 15% reduction in downtime. The client was able to extend the life of their existing equipment while achieving substantial cost savings. How to Get Started with EIGEMBox Ready to revolutionize your semiconductor manufacturing processes with EIGEMBox? Here’s how you can get started:

Contact Us: Reach out to our team for a consultation. We’ll assess your current equipment and provide tailored recommendations for integrating EIGEMBox into your manufacturing environment.

Easy Installation: Once you’ve decided to move forward, our team will guide you through the simple installation process. No need for extensive configuration or setup – just plug it in and start reaping the benefits.

Ongoing Support: Our commitment to your success doesn’t end with installation. We offer comprehensive support to ensure that your EIGEMBox operates seamlessly and delivers the desired improvements in efficiency and productivity.

Contact Us Today! Don’t let outdated equipment hold back your semiconductor manufacturing operations. With EIGEMBox, you can achieve modern communication and control capabilities without the need for costly hardware or software installations. Contact us today to learn more about how EIGEMBox can transform your Canon MPA 600 Super Aligner and drive your manufacturing processes forward.

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Factory Automation Solution 

https://www.insphere.com.sg/ We believe that every equipment in the factory can be connected and data can be made available to increase productivity, reducing costs and human errors and ultimately improving quality. Our customers value their alliance with us because of our product reliability, simplicity, expertise and professional support. ​

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Global leader in SECS/GEM, GEM300, Smart Factory & Industry 4.0.

SECS/ GEM, the communication interface protocol for communication between a semiconductor equipment and fab host. Fab host is a software application that is controlling and monitoring equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 - HSMS) or RS-232 (using SEMI standard E4 – SECS-I). The SECS/GEM standard interface is used to start as well as stop equipment processing, collect measurement data, select recipes for products and change variables. With SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model), all this can be performed in a standard way. SECS/GEM protocol has been standardized by the non-profit association SEMI (Semiconductor Equipment and Materials International). Check www.SEMI.org to learn more about SEMI standards and SECS/GEM protocol.

In simple words, the SECS/GEM standard defines messages, state machines and scenarios to enable factory host applications to control as well as monitor manufacturing equipment. GEM standard is officially designated as SEMI standard E30, but frequently referred to as the GEM or SECS/GEM standard. The GEM is beneficial for both device manufacturers and equipment suppliers as it defines common set of equipment behavior and communication capabilities to provide functionality as well as flexibility to support manufacturing. Since GEM standard has only a few semiconductor-specific features, it has been adopted by other manufacturing industries as well, such as PV.

Among the capabilities offered by the SECS/GEM standard is –

For a fab host to start and stop processing

For a fab host to select, download and upload recipes     from/to the equipment

For a fab host to query the equipment for values of     various process parameters and equipment configuration

For a fab host to set equipment configuration parameter     values

For equipment to send alarms to the fab host

For a fab host to define reports of various variables and     associate them with events such as lot start or wafer complete

For equipment to send various events and associated     reports to the fab host

Since SECS/GEM is a communication protocol, it is platform and technology as well as programming language independent. The host side of a connection is executing on a computer system provided by the factory, and the equipment side of a connection is running on a controller computer provided by the equipment manufacturer. This gives both – the fab as well as the equipment manufacturer interoperability, flexibility, and platform independence. Both, the fab and the OEM can develop their software application without having to worry about communication compatibility, as long as both of them are adhering to SECS/GEM standards.

EINNOSYS Inc offers software solutions for both - the FABs to integrate with FAB host as well as for the OEMs to integrate with their controller software. By integrating EIGEM – Einnosys SECS/GEM software, the equipment or fab host becomes SECS/GEM capable without having to learn the details of various SEMI standards.

SECS describe the communication between a host computer and the equipment using a single connection. In the original concept and even today in the most common scenario, the equipment provides a single SECS interface for exclusive use by a single host. The message types defined by SECS are partially asymmetric - some message types are defined only for host use, others are defined only for equipment, but also many of them are defined for the same use by either side.

However, there is a provision in the SECS standards for sharing a connection by specifying the device identification value in each message. The practice of connection sharing is not recommended for new deployments. It is a common practice that a connection is maintained for long periods of time and only interrupted if the equipment or host is rebooted. SECS connections are lightweight and don’t use much network bandwidth. It is possible to run several SECS connections on a typical desktop computer.

Products for Semiconductor Equipments:

   EINEM: SECS/GEM software for equipment and fabs  

   Mobile Monitor: Monitoring critical equipment/recipe parameters on the mobile device

   Modbus Library for Android: Modbus library for Android platform

Products for Semiconductor Fabs:

   EINEM: SECS/GEM software for equipment and fabs  

   Recipe Server/ Stepper Job Server: Manages recipes, including versions and audit trail of recipe changes across different equipment types

   Barcode Guardian: Prevents the wrong pour of chemicals and manages chemical inventory in the fab  

   Reticle Tracker: Manages reticle inventory across multiple locations and offers time and cost saving reports

   Manual Wetbench Automation: Prevents wrong wafer dips on manual wet benches without an expensive upgrade

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Introduction to SECS/GEM: Revolutionizing Semiconductor Manufacturing

What is SECS/GEM?

SECS/GEM (SEMI Equipment Communications Standard/Generic Equipment Model) is a set of standards developed by SEMI (Semiconductor Equipment and Materials International) to facilitate communication and control in semiconductor manufacturing. It allows equipment and factory systems to interact seamlessly, enabling automated processes, real-time data collection, and precise control over manufacturing operations.

History and Evolution of SECS/GEM

The SECS/GEM standards emerged in the 1980s to address the growing complexity and automation needs in semiconductor manufacturing. Initially, SECS-I (SEMI Equipment Communications Standard 1) used RS-232 serial communication. As technology advanced, the need for faster communication led to the development of HSMS (High-Speed SECS Message Services), which utilizes TCP/IP for quicker and more reliable data transmission.

Importance of SECS/GEM in the Semiconductor Industry In the semiconductor industry, precision and efficiency are crucial. SECS/GEM ensures that equipment from different manufacturers can communicate using a standardized protocol, reducing integration time and costs. This standardization enhances productivity, minimizes downtime, and improves yield by enabling precise monitoring and control of manufacturing processes.

How SECS/GEM Enhances Equipment Communication and Control

Detailed Overview of SECS/GEM Protocols

SECS/GEM consists of two main protocols:

SECS-I (SEMI Equipment Communications Standard 1):

Uses RS-232 for serial communication.

Suitable for environments where high-speed communication is not critical.

HSMS (High-Speed SECS Message Services):

Uses TCP/IP for faster communication.

Ideal for modern manufacturing environments requiring high-speed data exchange.

GEM provides a standardized model for equipment behavior, including status reporting, data collection, and control commands, making it easier to manage and integrate various equipment. Benefits of Using SECS/GEM for Equipment Communication Standardization: Facilitates seamless integration of equipment from different vendors.

Real-Time Data Collection: Enables continuous monitoring of equipment performance and process parameters.

Enhanced Automation: Reduces manual intervention, leading to higher efficiency and productivity.

Improved Yield: Precise control and monitoring help identify and rectify issues promptly, enhancing overall yield.

Examples of SECS/GEM in Action

Wafer Fabrication: SECS/GEM is used to monitor and control processes such as etching, doping, and deposition.

Assembly and Test: Ensures that testing equipment communicates effectively with the MES (Manufacturing Execution System) to provide real-time results and feedback. Implementing SECS/GEM in Your Manufacturing Process

Steps to Integrate SECS/GEM with Existing Equipment

Assessment: Evaluate your current equipment and determine SECS/GEM compatibility.

Selection: Choose appropriate SECS/GEM software and hardware solutions.

Integration: Install and configure the SECS/GEM interfaces with your equipment and factory systems.

Testing: Conduct thorough testing to ensure proper communication and control.

Training: Provide training for staff on the new system and its functionalities.

Challenges and Solutions in SECS/GEM Implementation

Compatibility Issues: Ensure that both old and new equipment can communicate using SECS/GEM standards.

Technical Expertise: Invest in training and, if necessary, consult with experts to facilitate smooth integration.

Cost: While initial implementation might be costly, the long-term benefits in efficiency and yield outweigh these expenses.

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SECS(SEMI 장비 통신 표준)/GEM(일반 장비 모델)은 반도체 장치와 팹 호스트 간의 통신을 위한 통신 인터페이스 프로토콜입니다. Fab-Host는 SECS/GEM 프로토콜을 사용하여 장치 처리를 제어하고 모니터링하는 소프트웨어 응용 프로그램입니다. SECS/GEM 호환 장치는 TCP/IP(SEMI 표준 E37 및 E37.1 – HSMS 사용) 또는 RS-232(SEMI 표준 E4 – SECS-I 사용)를 통해 팹 호스트와 통신할 수 있습니다.

SECS/GEM 표준 인터페이스는 장치 처리를 시작 및 중지하고, 측정 데이터를 수집하고, 제품에 대한 레시피를 선택하고, 변수를 변경하는 데 사용됩니다. SECS/GEM을 사용하면 이 모든 것을 즉시 수행할 수 있습니다. SECS/GEM 프로토콜은 비영리 협회 SEMI(반도체 장비 및 재료 국제)에서 표준화했습니다. SEMI 표준 및 SECS/GEM 프로토콜에 대해 자세히 알아보려면 www.SEMI.org를 방문하십시오.

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Looking for industry 4.0 & smart factory manufacturing company? eInnoSys offers products and solutions for smart factory to make your equipment industry 4.0 ready. Industry 4.0 is de-centralized with communication between sensors, equipment, material and the factory.

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Featuring more than 550 exhibitors in over 2,000 booths and chip industry leaders such as TSMC, ASE and Nanya Technology, SEMICON Taiwan 2021 – themed Forward as One – will showcase cutting-edge advances and solutions in critical semiconductor industry areas including heterogeneous integration, green manufacturing, smart and advanced manufacturing, advanced testing, strategic materials, and MEMS and sensors.

SEMICON Taiwan 2021 was rescheduled after Taiwan’s Central Epidemic Command Center (CECC) recently relaxed restrictions on social distancing and exhibition size following a successful push to reduce the number of COVID-19 cases. With the safety and well-being of all event participants a top priority, SEMI will meet the highest standards in implementing pandemic prevention measures during the exhibition.

“Taiwan is a semiconductor manufacturing powerhouse that produces some of the world’s most sophisticated chips and has led semiconductor equipment spending in seven of the past 10 years,” said Terry Tsao, Chief Marketing Officer at SEMI and President of SEMI Taiwan. “With Taiwan’s central position in the semiconductor industry, SEMICON Taiwan 2021 offers visitors unmatched opportunities to connect with some of the industry’s top companies and uncover new business opportunities across leading-edge technologies including artificial intelligence (AI), Internet of Things (IoT), 5G and machine learning that are transforming the microelectronics industry and giving rise to a growing universe of smart applications.”

Five Online Forums Pave the Way to SEMICON Taiwan 2021

The journey to SEMICON Taiwan 2021 began in September with five live online forums featuring expert insights into critical semiconductor industry areas – Power and Opto Chips, Smart Manufacturing, Sustainable Manufacturing, Smart MedTech and Cybersecurity. Available on-demand through November, the online events offer insights into future semiconductor industry trends.

About Einnosys

eInnoSys is a pure play automation company for semiconductor and other related industries such as PV (solar), MEMS, Flat Panel Display (FPD), LED and other such electronics industries. We serve Equipment Manufacturers (OEMs) and factories – Fabs, ATMs (Assembly Test Manufacturing). eInnoSys is a customer centric and solution oriented company, offering automation products as well as custom automation solutions for OEMs and factories.

eInnoSys is a global leader in Equipment Software & Fab Automation for Semiconductor, Solar(PV), LED, FPD and other related Electronics industries Experts at SECS/GEM, GEM300, Smart Factory & Industry 4.0

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eInnoSys offers SECS/GEM software solutions for equipment manufacturers (OEMs) as well as factories (FABs or ATMs). By integrating eInnoSys’ EIGEMEquipment plug-n-play software with equipment controller software of an equipment, OEMs can significantly reduce the cost and time it takes to make their equipment SECS/GEM capable.

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EIGEMBox is a unique product that adds SECS/GEM capability to your existing equipment without any hardware or software installation!

If your factory has old, legacy equipment for which you need SECS/GEM capability for factory automation, EIGEMBox is the perfect solution and its plug-n-play.

All you need to do is just connect one or two cables from the EIGEMBox to your equipment and connect your factory host, FDC, MES, or another automation system to the HSMS or SECS-I port of the EIGEMBox, configure the system through EIGEMBox Recipe Editor and that’s it! Now you are not only able to collect data, alarms, and events from the equipment but also able to send remote commands such as PP-SELECT, START, ABORT, STOP, etc.

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Einnosys offers various solutions for Yield Improvement, ranging from simple barcode scanning of the lot boxes to very complex analysis of yield related issues by correlating end-to-end wafer data. Our team members have decades of experience in improving yield at all areas of Assembly, Test, Packaging factories and FABs.

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The organization that defines and governs the standards for semiconductor manufacturing, equipment, automation, and other relevant areas is SEMI.org. It is an international body for semiconductor manufacturers and equipment manufacturers.

Factory automation standards defined by SEMI are generally known as SECS/GEM standards, which for 200mm wafer processing is comprised of four main standards: SECS-I (E4), SECS-II (E5), HSMS (E37) and GEM (E30) standards.

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For over two decades, eInnoSys team members have been implementing SECS/GEM and GEM300 standards on the equipment as well as using them in the fab/assembly for automation. We offer a complete turnkey solution to make your equipment fully SECS/GEM or GEM300 compliant. Our domain knowledge and experience not only helps to make your implementation a success but also greatly reduces the time and cost of integration. Our solution comes with required manuals, SECS/GEM and GEM300 compliance report along with required logs for OEMs to provide to their factory customers.

SECS/GEM & GEM300 are a set of a communication protocol for a piece of semiconductor equipment and factory host. These standards are maintained by SEMI. While GEM300 refers to a set of communication standards for 300mm wafers, which are more than those for 200mm, SECS/GEM is used as a generic term for both 200 and 300mm communication protocols and other automation standards.

EIGEMEquipment is a SECS/GEM software of eInnoSys, which comes with support for most of the SECS messages for 200mm out‐of‐the‐box.

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Factory automation standards and SECS/GEM standards information like Fab Automation, SECS-I (E4), SECS-II (E5), HSMS (E37) and GEM (E30) services such as tasks, event report, data collection and recipe management.

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除了實施複雜的產量提高項目外，我們的員工還發表了技術論文，介紹如何使用創新的開箱即用的自動化方法來提高工廠的產量。